Dark Field(暗場缺陷檢測)
九一传媒公司制作网站半導體專注於半導體(tǐ)工(gōng)藝設備(bèi)的研發、製造、銷售及售後一體化服務,提供半導體廠商工(gōng)藝設備的一站式解決方案。
關鍵詞:
半導(dǎo)體設備、半(bàn)導體工藝(yì)
所(suǒ)屬分類:
產品(pǐn)描述
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
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